High vacuum pump oil
HIGH-PERFORMANCE OILS THAT CREATE HIGH QUALITY VACUUMS
NEOVAC is well-known as a synonym for high quality vacuum pump oil. We have received endorsements of NEOVAC as the oil used by many vacuum pump manufacturers due to the high level of trust placed in NEOVAC's performance. NEOVAC is used in vacuum equipment in applications such as semiconductors, silicon wafers, vacuum deposition, heat treatment, and packaging and contributes to productivity improvements.
Petroleum-based rotary pump oil
Rotary pump vacuum oil is used with the purposes of lubrication and the preservation of airtight seals. It has a low steam pressure, suitable viscosity, and is difficult to emulsify (it has anti-emulsification properties). In other words, it easily separates from water and removes water.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
Flash point ℃ | merit & use | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Product Information |
|---|---|---|---|---|---|---|
| MR-100 | 44 | 230 | Standard for small pump. | L0.5 | 1.3X10-2 or less (1X10-4） | リンク |
| MR-200 | 71 | 256 | Standard for ratary pump. | L0.5 | 1.3X10-3 or less (1X10-5） | リンク |
| MR-250 | 105 | 270 | Standard for large pump. | 0.5 | 1.3X10-3 or less (1X10-5） | リンク |
| ST-200 | 76 | 252 | Improved sludge dispersion, heat and oxidation resistance. (Moisture suction is not supported) | L2.0 | 1.3X10-2 or less (1X10-4） | リンク |
| MR-200A | 71 | 252 | Improved heat and oxidation. Moisture suction is supported. | L0.5 | 1.3X10-3 or less (1X10-5） | リンク |
| MR-250A | 105 | 270 | Improved heat and oxidation. Moisture suction is supported. For large pump. | L0.5 | 1.3X10-3 or less (1X10-5） | リンク |
Synthetic rotary pump oil
These products have heat resistance and oxidation resistance that exceed those of petroleum rotary pump oils. These products are well suited to special applications in harsh usage environments such as the electronics industry, the physics and chemistry equipment industry, and the atomic energy industry.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
Flash point ℃ | merit & use | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Product Information |
|---|---|---|---|---|---|---|
| SO-M | 64 | 264 | Excellent heat and oxidation resistance. | L0.5 | 4X10-4 or less (3X10-6） | リンク |
| SO-H | 95 | 285 | High viscosity than SO-M. | L0.5 | 4X10-5 or less (3X10-7） | リンク |
| SA-L | 32 | 240 | Low viscosity than SA-M. | L0.5 | 4X10-4 or less (3X10-6） | リンク |
| SA-M | 64 | 260 | Improved oxidation stability of SO-M. | L0.5 | 4X10-4 or less (3X10-6） | リンク |
| SA-H | 95 | 280 | Improved oxidation stability of SO-H. | L0.5 | 4X10-5 or less (3X10-7） | リンク |
Special type rotary pump oil
Even if microscopic powder or reaction products are mixed into these oils, the increase in oil viscosity can be controlled, which makes it possible to reduce the frequency of oil changes. These are special vacuum pump oils that conform to semiconductor manufacturing processes.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
Flash point ℃ | merit & use | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Product Information |
|---|---|---|---|---|---|---|
| DR-M | 70 | 234 | For vacuum CVD. Excellent inhibitory effect of thickning. | L1.5 | 1.3X10-2 or less (1X10-4） | リンク |
| SA | 38 | 254 | For environmental measurement equipment. Excellent heat and oxidation resistance. | L2.5 | 6.5X10-2 or less (5X10-4） |
Oil diffusion pump oil
Diffusion pump vacuum oil is sprayed either as molecules or as a steam and is used to obtain a vacuum state. It is necessary for these oils to be chemically stable such as by having low steam pressures, by not being transformed due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
mean molecular weight |
Flash point ℃ | merit & use | Vapor pressure Pa(Torr) (25℃) |
Ulrimate pressure | Product Information |
|---|---|---|---|---|---|---|---|
| SX | 22 | 約394 | 235 | For surface treatment equipment. (vapor deposition, sputter, heat treatment) | 7X10-6 or less (5X10-8） | リンク | |
| SY | 26 | 約422 | 240 | For surface treatment equipment. (vapor deposition, sputter, heat treatment) | 1.3X10-6 or less (1X10-8） | リンク |
MORESCO-EXCELLOL
| Product No. | kinematic viscosity mm2/s (40℃) |
mean molecular weight |
Flash point ℃ | merit & use | Vapor pressure Pa(Torr) (25℃) |
Ulrimate pressure | Product Information |
|---|---|---|---|---|---|---|---|
| 54 | 290 | 約446 | 300 | For precision analysis equipment. (electron microscopy, mass spectrometer) | 7X10-9 or less (5X10-11） |
Booster ejector pump oil
Booster ejector pumps, like oil diffusion pumps, are a type of steam spray pump. They are used to spray oil as a steam. These oils have low steam pressures and fast exhaust velocities. Vacuum oils with highly stable heat resistance and oxidation resistance are required.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
mean molecular weight |
Flash point ℃ | merit & use | Vapor pressure Pa(Torr) (25℃) |
Ulrimate pressure | Product Information |
|---|---|---|---|---|---|---|---|
| DB-12 | 24 | 330～340 | 212 | For surface treatment equipment. (vapor deposition, sputter) | 6.7X10-4 or less (5X10-6） | リンク | |
| ME-250 | 13 | 260～270 | 188 | For surface treatment equipment. (vapor deposition, sputter, heat treatment) | 1.3X10-2 or less (1X10-4） | リンク |
Mechanical booster pump oil
This pump increases the flow speed in the same manner that a turbo charger attached to a vehicle's engine works. Mechanical booster pump vacuum oil is used on bearings to lubricate them and make them airtight. It is necessary for these oils to be chemically stable such as by having low steam pressures, by having excellent lubricating properties, by having heat resistance, and by having oxidation resistance.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
Flash point ℃ | merit & use | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Product Information |
|---|---|---|---|---|---|---|
| EP-83 | 84 | 260 | For gear lubrication of a mechanical booster pump. | L1.0 | 1.3X10-3 or less (1X10-5） | - |
Center valve oil
The center valve is the rotating part of vacuum tube manufacturing equipment. Center valve oil is used on the sliding surfaces to lubricate them and make them airtight. It is necessary for these oils to be chemically stable such as by having low steam pressures, by having excellent lubricating properties, by having heat resistance, and by having oxidation resistance.
NEOVAC
| Product No. | kinematic viscosity mm2/s (40℃) |
mean molecular weight |
Flash point ℃ | merit & use | Vapor pressure Pa(Torr) (25℃) |
Ulrimate pressure | Product Information |
|---|---|---|---|---|---|---|---|
| MC-400 | 160 | 280 | For center valve lubrication of fluorescent and bulb manufacturing equipmanet. | 1.3X10-4 or less (1X10-6） | リンク | ||
| MC-600 | 250 | 298 | For center valve lubrication of fluorescent and bulb manufacturing equipmanet. | 1.3X10-4 or less (1X10-6） | リンク | ||
| MC-1000 | 430 | 320 | For center valve lubrication of fluorescent and bulb manufacturing equipmanet. | 1.3X10-4 or less (1X10-6） | リンク |
Vacuum grease
This product provides excellent properties as a vacuum seal and lubricant that has a low steam pressure and a wide usage temperature range.
NEOVAC
| Product No. | Appearance | Consistency (25℃) |
merit & use | Operational temperature | Vapor pressure Pa(Torr) (25℃) |
Product Information |
|---|---|---|---|---|---|---|
| GREASE | Semi transparent white grease | 280 | Sealing grease of vacuum equipment. | 25～100℃ | 1.0X10-3 or less (1X10-5） |
