High Vacuum Pump Oil
High performance oil that creates high vacuums
"NEOVAC" is widely known as a synonym for high vacuum pump oil. The high reliability of its performance has led to it being recommended by many vacuum pump manufacturers as the oil to be used. It is used on vacuum equipment for semiconductors, silicon wafers, vapor deposition, heat treatment and packaging, and it contributes to improved productivity.
"NEOVAC-S" series are PFAS-Free synthetic high vacuum pump oil. Please contact us, if you need more information.
Petroleum-based rotary pump oil
The vacuum oil on a rotary pump is used for lubrication and to maintain airtightness. It is important that it has a low vapor pressure and the appropriate viscosity and that it is difficult to emulsify (it has anti-emulsification properties). In other words, it must easily separate from water and it must be easy to remove the water.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Flash point | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| MR-100 | 44 | 230 | L0.5 | 1.3 × 10-2 or below (1 × 10-4) | Standard item for compact pumps. |  |
| MR-200 | 71 | 256 | L0.5 | 1.3 × 10-3 or less (1 × 10-5) | Standard item suitable for all rotary pumps. | |
| MR-250 | 105 | 270 | L0.5 | 1.3 × 10-3 or less (1 × 10-5) | Standard item for large pumps. | |
| ST-200 | 76 | 252 | L2.0 | 1.3 × 10-2 or below (1 × 10-4) | Item with improved sludge dispersibility, heat resistance and oxidizing properties (does not support moisture suction) | |
| MR-200A | 71 | 256 | L0.5 | 1.3 × 10-3 or less (1 × 10-5) | Item with heat resistance and oxidizing properties improved from MR-200, item supporting moisture suction. | |
| MR-250A | 105 | 270 | L0.5 | 1.3 × 10-3 or less (1 × 10-5) | Item with heat resistance and oxidizing properties improved from MR-250, item supporting moisture suction (for large pumps) | |
Synthetic rotary pump oil
These oils demonstrate better heat resistance and oxidation resistance than petroleum-based rotary pump oils. They are suitable for special applications in harsh usage environments, such as in the electronics industry, the physical and chemical equipment industry and the nuclear power industry. PFAS-Free products. Please contact us, if you need more information.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Flash point | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| SO-M | 64 | 264 | L0.5 | 4 × 10-4 or less (3 × 10-6) | This has excellent reactive gas resistance. | |
| SO-H | 95 | 285 | L0.5 | 4 × 10-5 or less (3 × 10-7) | High viscosity version of SO-M (for large pumps) | |
| SA-L | 32 | 240 | L0.5 | 4 × 10-4 or less (3 × 10-6) | Low viscosity version of SA-M (for compact pumps) | |
| SA-M | 64 | 260 | L0.5 | 4 × 10-4 or less (3 × 10-6) | Item with oxidation stability improved from SO-M. | |
| SA-H | 95 | 280 | L0.5 | 4 × 10-5 or less (3 × 10-7) | Item with oxidation stability improved from SO-H (for large pumps) | |
Special type rotary pump oil
Even if fine powders or reaction products become mixed into these oils, the increase in oil viscosity can be suppressed and the frequency of oil replacement can be reduced. These is special vacuum pump oil that is suitable for semiconductor manufacturing processes.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Flash point | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| DR-M | 70 | 234 | L1.5 | 1.3 × 10-2 or below (1 × 10-4) | For low pressure CVD. Exhibits excellent viscosity suppression effect. | |
| SA | 38 | 254 | L2.5 | 6.5 × 10-2 or less (5 × 10-4) | For environmental measurement equipment. This has excellent heat resistance and oxidation resistance. |
Oil diffusion pump
Diffusion pump vacuum oil is sprayed in the molecular state or as vapor and is used to obtain a vacuum state. It is required that it is chemically stable, such as by having a low vapor pressure, by not deteriorating due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).
| Product No. | Dynamic viscosity mm2/s (40℃) |
Mean molecular weight | Flash point | Vapor pressure Pa(Torr) (50℃) |
Ultimate pressure Pa(Torr) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|---|
| SX | 22 | Approx. 394 | 235 | 7 × 10-6 or less (5 × 10-8) | 1.3 × 10-5 or less (1 × 10-7) | For surface treatment equipment (vapor deposition, sputter, heat treatment) | |
| SY | 26 | Approx. 422 | 240 | 1.3 × 10-6 or less (1 × 10-8) | 6.6 × 10-6 or less (5 × 10-8) | For surface treatment equipment (vapor deposition, sputter, heat treatment) | |
| Product No. | Dynamic viscosity mm2/s (40℃) |
Mean molecular weight | Flash point | Vapor pressure Pa(Torr) (50℃) |
Ultimate pressure Pa(Torr) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|---|
| 54 | 290 | Approx. 446 | 300 | 7 × 10-9 or less (5 × 10-11) | 1.3 × 10-8 or less (1 × 10-10) | For precision analysis equipment such as electronic microscopes and mass spectrometers |
Booster ejector pump oil
Like oil diffusion pumps, booster ejector pumps are a type of vapor injection pump. They are used to spray oil as a vapor. These oils must have a low vapor pressure and high pumping speed. It is also required that the vacuum oil has high stability regarding heat resistance and oxidation resistance.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Mean molecular weight | Flash point | Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| ME-250 | 13 | 260～270 | 188 | 1.3 × 10-2 or below (1 × 10-4) | For surface treatment equipment (vapor deposition, sputter, heat treatment) | |
| DB-12 | 24 | 330～340 | 212 | 6.7 × 10-4 or less (5 × 10-6) | For surface treatment equipment (vapor deposition, sputter) | |
Mechanical booster pump oil
These are pumps that increase the flow speed like a turbocharger on a car engine. Vacuum oil is used on mechanical boosters for the lubrication of the bearings and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Flash point | Color (ASTM) |
Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| EP-83 | 84 | 260 | L1.0 | 1.3 × 10-3 or less (1 × 10-5) | This demonstrates excellent performance as a lubricating oil for the gear part of mechanical booster pumps. |
Center valve oil
A center valve is used as the rotating part on bulb manufacturing equipment. Center valve oil is used for the lubrication of its sliding surface and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.
| Product No. | Dynamic viscosity mm2/s (40℃) |
Flash point | Vapor pressure Pa(Torr) (50℃) |
Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|
| MC-400 | 160 | 280 | 1.3 × 10-4 or less (1 × 10-6) | For center valve lubrication on equipment producing fluorescent lamps and bulbs | |
| MC-600 | 250 | 298 | 1.3 × 10-4 or less (1 × 10-6) | For center valve lubrication on equipment producing fluorescent lamps and bulbs | |
| MC-1000 | 430 | 320 | 1.3 × 10-4 or less (1 × 10-6) | For center valve lubrication on equipment producing fluorescent lamps and bulbs | |
Vacuum grease
This grease has a low vapor pressure and a wide usage temperature range and it exhibits excellent performance as sealant and lubricant for vacuum systems.
| Product No. | Consistency (25℃) |
Vapor pressure Pa(Torr) (50℃) |
Usage temperature | Appearance | Merits and applications |
Product guide （PDF） |
|---|---|---|---|---|---|---|
| Greases | 280 | 1.0 × 10-3 or less (1 × 10-5) | 25～100 | White semitransparent grease | Grease for sealing on various vacuum equipment. |
