Products

High Vacuum Pump Oil

High performance oil that creates high vacuums

"NEOVAC" is widely known as a synonym for high vacuum pump oil. The high reliability of its performance has led to it being recommended by many vacuum pump manufacturers as the oil to be used. It is used on vacuum equipment for semiconductors, silicon wafers, vapor deposition, heat treatment and packaging, and it contributes to improved productivity.

Petroleum-based rotary pump oil

The vacuum oil on a rotary pump is used for lubrication and to maintain airtightness. It is important that it has a low vapor pressure and the appropriate viscosity and that it is difficult to emulsify (it has anti-emulsification properties). In other words, it must easily separate from water and it must be easy to remove the water.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Flash point Color
(ASTM)
Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
MR-100 44 230 L0.5 1.3 × 10-2 or below (1 × 10-4) Standard item for compact pumps. Click to Product guide PDF
MR-200 71 256 L0.5 1.3 × 10-3 or less (1 × 10-5) Standard item suitable for all rotary pumps. Click to Product guide PDF
MR-250 105 270 L0.5 1.3 × 10-3 or less (1 × 10-5) Standard item for large pumps. Click to Product guide PDF
ST-200 76 252 L2.0 1.3 × 10-2 or below (1 × 10-4) Item with improved sludge dispersibility, heat resistance and oxidizing properties (does not support moisture suction) Click to Product guide PDF
MR-200A 71 256 L0.5 1.3 × 10-3 or less (1 × 10-5) Item with heat resistance and oxidizing properties improved from MR-200, item supporting moisture suction. Click to Product guide PDF
MR-250A 105 270 L0.5 1.3 × 10-3 or less (1 × 10-5) Item with heat resistance and oxidizing properties improved from MR-250, item supporting moisture suction (for large pumps) Click to Product guide PDF

Synthetic rotary pump oil

These oils demonstrate better heat resistance and oxidation resistance than petroleum-based rotary pump oils. They are suitable for special applications in harsh usage environments, such as in the electronics industry, the physical and chemical equipment industry and the nuclear power industry.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Flash point Color
(ASTM)
Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
SO-M 64 264 L0.5 4 × 10-4 or less (3 × 10-6) This has excellent reactive gas resistance. Click to Product guide PDF
SO-H 95 285 L0.5 4 × 10-5 or less (3 × 10-7) High viscosity version of SO-M (for large pumps) Click to Product guide PDF
SA-L 32 240 L0.5 4 × 10-4 or less (3 × 10-6) Low viscosity version of SA-M (for compact pumps) Click to Product guide PDF
SA-M 64 260 L0.5 4 × 10-4 or less (3 × 10-6) Item with oxidation stability improved from SO-M. Click to Product guide PDF
SA-H 95 280 L0.5 4 × 10-5 or less (3 × 10-7) Item with oxidation stability improved from SO-H (for large pumps) Click to Product guide PDF

Special type rotary pump oil

Even if fine powders or reaction products become mixed into these oils, the increase in oil viscosity can be suppressed and the frequency of oil replacement can be reduced. These is special vacuum pump oil that is suitable for semiconductor manufacturing processes.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Flash point Color
(ASTM)
Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
DR-M 70 234 L1.5 1.3 × 10-2 or below (1 × 10-4) For low pressure CVD. Exhibits excellent viscosity suppression effect. Click to Product guide PDF
SA 38 254 L2.5 6.5 × 10-2 or less (5 × 10-4) For environmental measurement equipment. This has excellent heat resistance and oxidation resistance.

Oil diffusion pump

Diffusion pump vacuum oil is sprayed in the molecular state or as vapor and is used to obtain a vacuum state. It is required that it is chemically stable, such as by having a low vapor pressure, by not deteriorating due to heat (heat resistance), and by not reacting easily with oxygen (oxidation resistance).

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Mean molecular weight Flash point Vapor pressure
Pa(Torr)
(50℃)
Ultimate pressure
Pa(Torr)
Merits and
applications
Product guide
(PDF)
SX 22 Approx. 394 235 7 × 10-6 or less (5 × 10-8) 1.3 × 10-5 or less (1 × 10-7) For surface treatment equipment (vapor deposition, sputter, heat treatment) Click to Product guide PDF
SY 26 Approx. 422 240 1.3 × 10-6 or less (1 × 10-8) 6.6 × 10-6 or less (5 × 10-8) For surface treatment equipment (vapor deposition, sputter, heat treatment) Click to Product guide PDF
MORESCO EXCELLOL
Product No. Dynamic viscosity
mm2/s
(40℃)
Mean molecular weight Flash point Vapor pressure
Pa(Torr)
(50℃)
Ultimate pressure
Pa(Torr)
Merits and
applications
Product guide
(PDF)
54 290 Approx. 446 300 7 × 10-9 or less (5 × 10-11) 1.3 × 10-8 or less (1 × 10-10) For precision analysis equipment such as electronic microscopes and mass spectrometers

Booster ejector pump oil

Like oil diffusion pumps, booster ejector pumps are a type of vapor injection pump. They are used to spray oil as a vapor. These oils must have a low vapor pressure and high pumping speed. It is also required that the vacuum oil has high stability regarding heat resistance and oxidation resistance.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Mean molecular weight Flash point Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
ME-250 13 260~270 188 1.3 × 10-2 or below (1 × 10-4) For surface treatment equipment (vapor deposition, sputter, heat treatment) Click to Product guide PDF
DB-12 24 330~340 212 6.7 × 10-4 or less (5 × 10-6) For surface treatment equipment (vapor deposition, sputter) Click to Product guide PDF

Mechanical booster pump oil

These are pumps that increase the flow speed like a turbocharger on a car engine. Vacuum oil is used on mechanical boosters for the lubrication of the bearings and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Flash point Color
(ASTM)
Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
EP-83 84 260 L1.0 1.3 × 10-3 or less (1 × 10-5) This demonstrates excellent performance as a lubricating oil for the gear part of mechanical booster pumps.

Center valve oil

A center valve is used as the rotating part on bulb manufacturing equipment. Center valve oil is used for the lubrication of its sliding surface and to maintain airtightness. This oil is required to have a low vapor pressure and excellent lubricating performance, and to be chemically stable regarding aspects such as heat resistance and oxidation resistance.

NEOVAC
Product No. Dynamic viscosity
mm2/s
(40℃)
Flash point Vapor pressure
Pa(Torr)
(50℃)
Merits and
applications
Product guide
(PDF)
MC-400 160 280 1.3 × 10-4 or less (1 × 10-6) For center valve lubrication on equipment producing fluorescent lamps and bulbs Click to Product guide PDF
MC-600 250 298 1.3 × 10-4 or less (1 × 10-6) For center valve lubrication on equipment producing fluorescent lamps and bulbs Click to Product guide PDF
MC-1000 430 320 1.3 × 10-4 or less (1 × 10-6) For center valve lubrication on equipment producing fluorescent lamps and bulbs Click to Product guide PDF

Vacuum grease

This grease has a low vapor pressure and a wide usage temperature range and it exhibits excellent performance as sealant and lubricant for vacuum systems.

NEOVAC
Product No. Consistency
(25℃)
Vapor pressure
Pa(Torr)
(50℃)
Usage temperature Appearance Merits and
applications
Product guide
(PDF)
Greases 280 1.0 × 10-3 or less (1 × 10-5) 25~100 White semitransparent grease Grease for sealing on various vacuum equipment.